Advanced Technology Group (ATG) Semiconductor Fabrication Facility
The West Wafer Fabrication Facility addition provides Classes 10 and 100 cleanroom spaces for research and development teams to explore cutting-edge technologies in semiconductor fabrication. Using design-build to facilitate an aggressive design and construction schedule, the project included demolition and replacement of an existing space along with the addition.
The design team used a vibration analysis to modify the design of the subgrade and structure to mitigate vibration emanating from adjacent high-traffic roadway. The team also worked with city officials to conduct a campus-wide review for restrictive H5 fire-life safety classification requirements. Building systems, materials, and finishes were chosen for stringent air quality demands required for semiconductor fabrication.
Size: 37,000 sq. ft.
Components: Class 10 and Class 100 cleanrooms suites; Class 1,000 gowning rooms; chemical storage; mechanical penthouse; loading and receiving areas designed to maximize flexibility and efficiency